Testing Temperature Uniformity Across a Semiconductor Heater Surface
https://smart-heater-journal.clearhavendigest.com/posts/how-to-select-the-right-kapton-heater-size-and-wattage
In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery